1. In a manner relating to or involving epitaxy; by means of epitaxial growth or deposition of crystalline material on a substrate.
Usage: technical; materials science and semiconductor manufacturing

Examples

• The silicon layer was epitaxially grown on the sapphire substrate.
• Gallium arsenide can be epitaxially deposited to create high-performance semiconductor devices.
• The researchers epitaxially aligned the crystal structure to improve device efficiency.
• Thin films are often epitaxially formed to maintain lattice compatibility with the underlying material.